RESEARCHER PROFILE
Timo Sajavaara
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University of Jyväskylä
Timo Sajavaara works in Semiconductor materials and devices, Copper Interconnects and Reliability, Ion-surface interactions and analysis, Advanced Materials and Semiconductor Technologies, Electron and X-Ray Spectroscopy Techniques. Recorded institutional associations include University of Jyväskylä.
300Publications
9,164Citations
57H-index
Inclusion identifies researchers whose recorded research contributions may inform their university’s understanding of its research community. It does not rank individual research quality or establish current employment.
Selected research works
Up to 100 highly cited works; DOI links open the original research. Counts reflect the collected record, not real-time citation totals.
Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources
2000 · 489 citationsAtomic Layer Deposition of Platinum Thin Films
2003 · 399 citationsEffect of water dose on the atomic layer deposition rate of oxide thin films
2000 · 260 citationsPotku – New analysis software for heavy ion elastic recoil detection analysis
2014 · 252 citationsAtomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water
2004 · 218 citationsAtomic Layer Deposition of Hafnium Dioxide Films from Hafnium Tetrakis(ethylmethylamide) and Water
2002 · 199 citationsAluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
2013 · 184 citationsDetection efficiency of time-of-flight energy elastic recoil detection analysis systems
1999 · 167 citationsComparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors
2002 · 145 citationsShort-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation
2006 · 131 citationsProperties of AlN grown by plasma enhanced atomic layer deposition
2011 · 123 citationsAtomic layer deposition of polyimide thin films
2006 · 121 citationsPlasma-Enhanced Atomic Layer Deposition of Silver Thin Films
2011 · 119 citationsAtomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor-Strontium-bis(tri-isopropyl cyclopentadienyl)
2001 · 111 citationsLow-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation
2011 · 110 citationsLow-Temperature ALE Deposition of Y2O3 Thin Films from β-Diketonate Precursors
2001 · 106 citationsStudies on atomic layer deposition of MOF-5 thin films
2013 · 99 citationsReview Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
2016 · 96 citationsSurface-controlled growth of LaAlO3 thin films by atomic layer epitaxy
2001 · 93 citationsAtomic layer deposition of hafnium dioxide thin films from hafnium tetrakis(dimethylamide) and water
2005 · 92 citationsOverview of material re-deposition and fuel retention studies at JET with the Gas Box divertor
2006 · 92 citationsAtomic layer deposition of lithium containing thin films
2009 · 90 citationsTime-of-flight – Energy spectrometer for elemental depth profiling – Jyväskylä design
2014 · 81 citationsThermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
2014 · 80 citationsMonte Carlo simulation of multiple and plural scattering in elastic recoil detection
2001 · 80 citations